Laboratory of Electronic Devices and Systems
Department of Engineering
The laboratory of Electronic Device System is dedicated to applications concerning high sensitivity measurements, high sensitivity instrumentation development and electrical device characterization.
(left) front view of the measurement setup involved in the project consisting of: wafer station (KARL SUSS PM5) screen (Probe Station) to house the device under test (DUT), sample illumination lamp (LAMP), chamber (OPTIKAM B5) for display of the sample on a PC (CAMERA), HP4155B instrument for current-voltage measurements (SMUs), LCR-8110G instrument for impedance measurements, PC-based spectrum analyzer (DSA), KE2231A power supply for battery charging and chuck thermo-control, uninterruptible power supply (UPS); (right) rear view of the measurement setup consisting of the box containing the low noise section and the box containing batteries and control logic.
Technical specifications:
• wafer/package level setup from room to ~200 °C
• low level DC current characterization
• high-sensitivity (~ fA/Hz1/2) noise characterization in the low frequency range (<100 kHz)
• time and frequency domain analysis
• impedance measurements
• automatic and programmable DC, Low frequency Noise and Impedance measurement workflow
Block diagram of the measurement setup: the device under test (DUT) is housed in a shielded probe station; The SW switches connect, in an automatic and programmable way, the DUT terminals to the instruments for IV (HP4155B instrument), CV (LCR8110G) and NOISE (NI9239 and Low Noise Transimpedance amplifiers) measurements.
User interface for the system management